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Chapter title |
Photolithography
|
---|---|
Chapter number | 1217 |
Book title |
Encyclopedia of Microfluidics and Nanofluidics
|
Published by |
Springer, Boston, MA, January 2014
|
DOI | 10.1007/978-3-642-27758-0_1217-2 |
Book ISBNs |
978-3-64-227758-0
|
Authors |
Mauris DeSilva, DeSilva, Mauris |