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Chapter title |
Modeling of Electrostatically Actuated Microplates
|
---|---|
Chapter number | 4 |
Book title |
Micro Electro Mechanical Systems
|
Published by |
Springer, Singapore, January 2018
|
DOI | 10.1007/978-981-10-5945-2_4 |
Book ISBNs |
978-9-81-105944-5, 978-9-81-105945-2
|
Authors |
Zhao, Libo, Jiang, Zhuangde, Li, Zhikang, Zhao, Yihe |