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Micro Electro Mechanical Systems

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Cover of 'Micro Electro Mechanical Systems'

Table of Contents

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    Book Overview
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    Chapter 1 Modeling and Simulation of Silicon Anisotropic Etching
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    Chapter 2 Modeling and Simulation of Silicon Dry Etching
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    Chapter 3 Modeling and Simulation of SU-8 Thick Photoresist Lithography
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    Chapter 4 Modeling of Electrostatically Actuated Microplates
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    Chapter 5 Behavior Modeling and Simulation of an Inertial Sensor
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    Chapter 6 Online Test Microstructures of the Thermophysical Properties of MEMS Conducting Films
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    Chapter 8 Fracture Properties of MEMS/NEMS Thin Films
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    Chapter 9 Online Test Microstructures of the Mechanical Properties for Micromachined Multilayered Films
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    Chapter 10 Integrated Vacuum Microsensor Systems in CMOS Technology
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    Chapter 11 Micromachined Gas Inertial Sensors
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    Chapter 12 A Micromachined Vibratory Gyroscope
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    Chapter 13 Microsensors and Systems for Water Quality Determination
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    Chapter 14 Passive MEMS DC Electric Current Sensors
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    Chapter 15 A Micromachined Silicon Resonant Pressure Sensor
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    Chapter 16 High Temperature Silicon Pressure Sensors
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    Chapter 17 A Double Differential Torsional MEMS Accelerometer with Improved Temperature Robustness
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    Chapter 18 A Micromachined Thermal Wind Sensor
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    Chapter 19 Micro Thermal Flow Sensor
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    Chapter 21 Micro-Heater-Based Gas Sensors
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    Chapter 22 Microcalorometers for Detection of Trace Energetic Chemicals
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    Chapter 23 Piezoelectric Micro/Nano Mechanical Devices for Frequency Control and Chemical Sensing
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    Chapter 24 Micromachined Humidity Sensors
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    Chapter 25 Picogram-Order Mass Sensors via Cantilever-Based Micro-/Nanostructures
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    Chapter 26 Biochemical Sensors Based on Piezoresistive Microcantilevers
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    Chapter 27 A Rotary Microgripper
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    Chapter 28 MEMS Actuators Driven by Lorentz Force
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    Chapter 29 Traveling-Wave Micropumps
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    Chapter 30 Electrostatic Comb-Drived Actuator for MEMS Relay/Switch
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    Chapter 31 A MEMS Inertial Switch Based on Nonsilicon Surface Micromachining Technology
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    Chapter 32 A Microwave Power Sensor
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    Chapter 33 A Micromachined Reconfigurable Attenuator
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    Chapter 34 RF MEMS Switch
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    Chapter 35 High-Performance Acoustic Devices for Wireless Communication and Sensor Applications
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    Chapter 37 Silicon-Based Optical Sensor: Uncooled Infrared Focal Plane Array Based on Bi-Materials Cantilever Microstructures
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    Chapter 38 Triboelectric Nanogenerators
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    Chapter 39 MEMS Direct Methanol Fuel Cells
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    Chapter 40 MEMS Piezoelectric Vibration Energy Harvesters
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    Chapter 41 Microelectrode Array
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    Chapter 42 Electrode Array for Neural Interfaces
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    Chapter 43 Electrodes for Nerve Recording and Stimulation
Overall attention for this book and its chapters
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Citations

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Title
Micro Electro Mechanical Systems
Published by
Springer Singapore, January 2018
DOI 10.1007/978-981-10-5945-2
ISBNs
978-9-81-105944-5, 978-9-81-105945-2, 978-9-81-105946-9
Editors

Huang, Qing-An

X Demographics

X Demographics

The data shown below were collected from the profiles of 4 X users who shared this research output. Click here to find out more about how the information was compiled.
Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 82 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 82 100%

Demographic breakdown

Readers by professional status Count As %
Student > Master 3 4%
Student > Ph. D. Student 3 4%
Student > Doctoral Student 1 1%
Unknown 75 91%
Readers by discipline Count As %
Engineering 5 6%
Materials Science 1 1%
Medicine and Dentistry 1 1%
Unknown 75 91%