↓ Skip to main content
What is this page? Embed badge

Scanning Probe Lithography

Overview of attention for book
Cover of 'Scanning Probe Lithography'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Introduction to Scanning Probe Lithography
  3. Altmetric Badge
    Chapter 2 SPL by Electric-Field- Enhanced Oxidation
  4. Altmetric Badge
    Chapter 3 Resist Exposure Using Field-Emitted Electrons
  5. Altmetric Badge
    Chapter 4 SPL Linewidth Control
  6. Altmetric Badge
    Chapter 5 Critical Dimension Patterning Using SPL
  7. Altmetric Badge
    Chapter 6 High Speed Resist Exposure With a Single Tip
  8. Altmetric Badge
    Chapter 7 On-Chip Lithography Control
  9. Altmetric Badge
    Chapter 8 Scanning Probe Tips for SPL
  10. Altmetric Badge
    Chapter 9 Scanning Probe Arrays for Lithography
  11. Altmetric Badge
    Chapter 10 Epilog
Attention for Chapter 6: High Speed Resist Exposure With a Single Tip
Altmetric Badge

Citations

dimensions_citation
58 Dimensions
Summary Dimensions citations
So far, Dimensions has found 58 publications that cite this research output.

58

The most recent citing publications are shown below. View all 58 publications that cite this research output on Dimensions.

This page shows the most recent citations of this research output.

Click here to find out how to access more activity.

This page is provided by Altmetric.