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| Chapter title |
High Speed Resist Exposure With a Single Tip
|
|---|---|
| Chapter number | 6 |
| Book title |
Scanning Probe Lithography
|
| Published by |
Springer, Boston, MA, January 2001
|
| DOI | 10.1007/978-1-4757-3331-0_6 |
| Book ISBNs |
978-1-4419-4894-6, 978-1-4757-3331-0
|
| Authors |
Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate, Soh, Hyongsok T., Guarini, Kathryn Wilder, Quate, Calvin F. |