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Electrical Characterization of Silicon-on-Insulator Materials and Devices

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Cover of 'Electrical Characterization of Silicon-on-Insulator Materials and Devices'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Methods of Forming SOI Wafers
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    Chapter 3 SOI Devices
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    Chapter 4 Wafer-Screening Techniques
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    Chapter 5 Transport Measurements
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    Chapter 6 SIS Capacitor-Based Characterization Techniques
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    Chapter 7 Diode Measurements
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    Chapter 8 MOS Transistor Characteristics
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    Chapter 9 Transistor-Based Characterization Techniques
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    Chapter 10 Monitoring Transistor Degradation
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