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The Physics of Microfabrication

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Cover of 'The Physics of Microfabrication'

Table of Contents

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    Book Overview
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    Chapter 1 Preliminary Survey
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    Chapter 2 Particle Beams: Sources, Optics, and Interactions
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    Chapter 3 Thin Films
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    Chapter 4 Pattern Generation
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    Chapter 5 Special Processes Developed for Microcircuit Technology
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    Chapter 6 Submicron Microscopy and Microprobes
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    Chapter 7 Future Directions
Attention for Chapter 5: Special Processes Developed for Microcircuit Technology
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Citations

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