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| Chapter title |
Future Directions
|
|---|---|
| Chapter number | 7 |
| Book title |
The Physics of Microfabrication
|
| Published by |
Springer, Boston, MA, January 1982
|
| DOI | 10.1007/978-1-4899-2160-4_7 |
| Book ISBNs |
978-1-4899-2162-8, 978-1-4899-2160-4
|
| Authors |
Ivor Brodie, Julius J. Muray, Brodie, Ivor, Muray, Julius J. |