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MEMS: A Practical Guide to Design, Analysis, and Applications

Overview of attention for book
Cover of 'MEMS: A Practical Guide to Design, Analysis, and Applications'

Table of Contents

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    Book Overview
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    Chapter 1 Microtransducer Operation
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    Chapter 2 Material Properties: Measurement and Data
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    Chapter 3 MEMS and NEMS Simulation
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    Chapter 4 System-Level Simulation of Microsystems
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    Chapter 5 Thermal-Based Microsensors
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    Chapter 6 Photon Detectors
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    Chapter 7 Free-Space Optical MEMS
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    Chapter 8 Integrated Micro-Optics
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    Chapter 9 Microsensors for Magnetic Fields
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    Chapter 10 Mechanical Microsensors
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    Chapter 11 Semiconductor-Based Chemical Microsensors
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    Chapter 12 Microfluidics
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    Chapter 13 Biomedical Systems
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    Chapter 14 Microactuators
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    Chapter 15 Micromachining Technology
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    Chapter 16 LIGA Technology for R&D and Industrial Applications
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    Chapter 17 17 Interface Circuitry and Microsystems
Attention for Chapter 15: Micromachining Technology
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