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| Chapter title |
Thermal-Based Microsensors
|
|---|---|
| Chapter number | 5 |
| Book title |
MEMS: A Practical Guide to Design, Analysis, and Applications
|
| Published by |
Springer, Berlin, Heidelberg, January 2006
|
| DOI | 10.1007/978-3-540-33655-6_5 |
| Book ISBNs |
978-3-54-021117-4, 978-3-54-033655-6
|
| Authors |
Friedemann Vöelklein |