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Introductory MEMS

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Cover of 'Introductory MEMS'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 The substrate and adding material to it
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    Chapter 3 Creating and transferring patterns—Photolithography
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    Chapter 4 Creating structures—Micromachining
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    Chapter 5 Solid mechanics
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    Chapter 6 Thinking about modeling
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    Chapter 7 MEMS transducers—An overview of how they work
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    Chapter 8 Piezoresistive transducers
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    Chapter 9 Capacitive transducers
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    Chapter 10 Piezoelectric transducers
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    Chapter 11 Thermal transducers
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    Chapter 12 Introduction to microfluidics
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    Chapter 13 Microfabrication laboratories
Attention for Chapter 3: Creating and transferring patterns—Photolithography
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