You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Mendeley readers
Chapter title |
Creating and transferring patterns—Photolithography
|
---|---|
Chapter number | 3 |
Book title |
Introductory MEMS
|
Published by |
Springer, Boston, MA, January 2010
|
DOI | 10.1007/978-0-387-09511-0_3 |
Book ISBNs |
978-0-387-09510-3, 978-0-387-09511-0
|
Authors |
Thomas M. Adams, Richard A. Layton, Adams, Thomas M., Layton, Richard A. |
Mendeley readers
The data shown below were compiled from readership statistics for 12 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
Country | Count | As % |
---|---|---|
United Kingdom | 1 | 8% |
Unknown | 11 | 92% |
Demographic breakdown
Readers by professional status | Count | As % |
---|---|---|
Student > Master | 4 | 33% |
Student > Ph. D. Student | 3 | 25% |
Student > Bachelor | 3 | 25% |
Researcher | 2 | 17% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 7 | 58% |
Agricultural and Biological Sciences | 2 | 17% |
Chemistry | 2 | 17% |
Physics and Astronomy | 1 | 8% |