↓ Skip to main content
What is this page? Embed badge

Introductory MEMS

Overview of attention for book
Cover of 'Introductory MEMS'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Introduction
  3. Altmetric Badge
    Chapter 2 The substrate and adding material to it
  4. Altmetric Badge
    Chapter 3 Creating and transferring patterns—Photolithography
  5. Altmetric Badge
    Chapter 4 Creating structures—Micromachining
  6. Altmetric Badge
    Chapter 5 Solid mechanics
  7. Altmetric Badge
    Chapter 6 Thinking about modeling
  8. Altmetric Badge
    Chapter 7 MEMS transducers—An overview of how they work
  9. Altmetric Badge
    Chapter 8 Piezoresistive transducers
  10. Altmetric Badge
    Chapter 9 Capacitive transducers
  11. Altmetric Badge
    Chapter 10 Piezoelectric transducers
  12. Altmetric Badge
    Chapter 11 Thermal transducers
  13. Altmetric Badge
    Chapter 12 Introduction to microfluidics
  14. Altmetric Badge
    Chapter 13 Microfabrication laboratories
Attention for Chapter 4: Creating structures—Micromachining
Altmetric Badge

Citations

dimensions_citation
47 Dimensions

Readers on

mendeley
7 Mendeley
Summary Dimensions citations
So far, Dimensions has found 47 publications that cite this research output.

47

The most recent citing publications are shown below. View all 47 publications that cite this research output on Dimensions.

This page shows the most recent citations of this research output.

Click here to find out how to access more activity.

This page is provided by Altmetric.