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MEMS in der Mikrosystemtechnik

Overview of attention for book
Cover of 'MEMS in der Mikrosystemtechnik'

Table of Contents

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    Book Overview
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    Chapter 1 Einführung
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    Chapter 2 Grundlagen
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    Chapter 3 Verfahren der MEMS Fertigung
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    Chapter 4 Temperatursensoren
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    Chapter 5 Magnetfeldsensoren
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    Chapter 6 Strahlungssensoren und Fotodetektoren
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    Chapter 7 Mikro-Elektro-Mechanische Sensorsysteme
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    Chapter 8 Chemische Sensoren
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    Chapter 9 Systemintegration und Datenübertragung
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    Chapter 10 Energieversorgung
Attention for Chapter 1: Einführung
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