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| Chapter title |
Mikro-Elektro-Mechanische Sensorsysteme
|
|---|---|
| Chapter number | 7 |
| Book title |
MEMS in der Mikrosystemtechnik
|
| Published by |
Vieweg+Teubner Verlag, Wiesbaden, January 2005
|
| DOI | 10.1007/978-3-663-10778-1_7 |
| Book ISBNs |
978-3-51-900520-9, 978-3-66-310778-1
|
| Authors |
Markus Glück |