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Ionenimplantation

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Cover of 'Ionenimplantation'

Table of Contents

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    Book Overview
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    Chapter 1 Einleitung
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    Chapter 2 Grundlagen der Ionenimplantation
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    Chapter 3 Probleme bei der Implantation in reale Festkörper
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    Chapter 4 Ionenimplantationsapparaturen
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    Chapter 5 Meßmethoden zur Untersuchung ionenimplantierter Schichten
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    Chapter 6 Eigenschaften ionenimplantierter Halbleiterschichten
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    Chapter 7 Bauelemente
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    Chapter 8 Implantation in Nichthalbleiter
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    Chapter 9 Anhang
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    Chapter 10 Literatur
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