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| Chapter title |
Probleme bei der Implantation in reale Festkörper
|
|---|---|
| Chapter number | 3 |
| Book title |
Ionenimplantation
|
| Published by |
Vieweg+Teubner Verlag, Wiesbaden, January 1978
|
| DOI | 10.1007/978-3-663-05668-3_3 |
| Book ISBNs |
978-3-51-903206-9, 978-3-66-305668-3
|
| Authors |
Heiner Ryssel, Ingolf Ruge |