You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
| Chapter title |
Meßmethoden zur Untersuchung ionenimplantierter Schichten
|
|---|---|
| Chapter number | 5 |
| Book title |
Ionenimplantation
|
| Published by |
Vieweg+Teubner Verlag, Wiesbaden, January 1978
|
| DOI | 10.1007/978-3-663-05668-3_5 |
| Book ISBNs |
978-3-51-903206-9, 978-3-66-305668-3
|
| Authors |
Heiner Ryssel, Ingolf Ruge |