Improving the accuracy and precision of OCD measurement by systematic error correction in self-interference pupil ellipsometry
Conference proceeding in Proceedings of SPIE--the International Society for Optical Engineering (August 2023)
The most recent citing publications are shown below. View all 28 publications that cite this research output on Dimensions.
Conference proceeding in Proceedings of SPIE--the International Society for Optical Engineering (August 2023)
Article in Coatings (June 2023)
Article in Journal of Applied Physics (October 2022)