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Microelectronic Materials and Processes

Overview of attention for book
Cover of 'Microelectronic Materials and Processes'

Table of Contents

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    Book Overview
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    Chapter 1 Silicon Crystal Growth
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    Chapter 2 Silicon Epitaxy
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    Chapter 3 Silicon Oxidation
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    Chapter 4 Physical Vapor Deposition
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    Chapter 5 Chemical Vapor Deposition
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    Chapter 6 Dielectric Materials
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    Chapter 7 Properties and Applications of Silicides
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    Chapter 8 Forefront of Photolithographic Materials
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    Chapter 9 Fine-Line Lithography
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    Chapter 10 Dry Etching Processes
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    Chapter 11 Ion Implantation
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    Chapter 12 Diffusion in Semiconductors
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    Chapter 13 Interconnect Materials
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    Chapter 14 Imperfection and Impurity Phenomena
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    Chapter 15 Process Simulation
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    Chapter 16 Diagnostic Techniques
Attention for Chapter 2: Silicon Epitaxy
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