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Chapter title |
Imperfection and Impurity Phenomena
|
---|---|
Chapter number | 14 |
Book title |
Microelectronic Materials and Processes
|
Published by |
Springer, Dordrecht, January 1989
|
DOI | 10.1007/978-94-009-0917-5_14 |
Book ISBNs |
978-0-7923-0154-7, 978-9-40-090917-5
|
Authors |
K. V. Ravi, Ravi, K. V. |