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Dry Etching for VLSI

Overview of attention for book
Cover of 'Dry Etching for VLSI'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 The Plasma State
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    Chapter 3 The ac Discharge
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    Chapter 4 Gas and Surface Processes
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    Chapter 5 Reactor Technology
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    Chapter 6 Etch Processes
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    Chapter 7 Diagnostics and Endpoint Detection
Attention for Chapter 3: The ac Discharge
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Citations

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