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| Chapter title |
The Plasma State
|
|---|---|
| Chapter number | 2 |
| Book title |
Dry Etching for VLSI
|
| Published by |
Springer, Boston, MA, January 1991
|
| DOI | 10.1007/978-1-4899-2566-4_2 |
| Book ISBNs |
978-1-4899-2568-8, 978-1-4899-2566-4
|
| Authors |
A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader, van Roosmalen, A. J., Baggerman, J. A. G., Brader, S. J. H. |