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| Chapter title |
Strukturverkleinerung in der MOS-Technik
|
|---|---|
| Chapter number | 10 |
| Book title |
Technologie hochintegrierter Schaltungen
|
| Published by |
Springer, Berlin, Heidelberg, January 1988
|
| DOI | 10.1007/978-3-642-97059-7_10 |
| Book ISBNs |
978-3-54-018439-3, 978-3-64-297059-7
|
| Authors |
Dietrich Widmann, Hermann Mader, Hans Friedrich, Widmann, Dietrich, Mader, Hermann, Friedrich, Hans |