You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
Characterization of Reactive Intermediates in Silicon Etching and Deposition Using Laser Techniques
|
---|---|
Chapter number | 29 |
Book title |
Laser Processing and Diagnostics
|
Published by |
Springer, Berlin, Heidelberg, January 1984
|
DOI | 10.1007/978-3-642-82381-7_29 |
Book ISBNs |
978-3-64-282383-1, 978-3-64-282381-7
|
Authors |
S. A. Joyce, B. Roop, J. C. Schultz, K. Suzuki, J. Thoman, J. I. Steinfeld |