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Laser Processing and Diagnostics

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Cover of 'Laser Processing and Diagnostics'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Fundamentals of Laser Annealing
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    Chapter 2 Inhomogeneous Energy Deposition in Crystalline Silicon with Picosecond Pulses of One Micron Radiation
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    Chapter 3 Instabilities of Crystallization in Amorphous Germanium Under Pulsed Laser Irradiation
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    Chapter 4 Time Resolved Calorimetry of 30 nm Te-Films During Laser Annealing
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    Chapter 5 Pulsed Laser Annealing of GaAs: A Comparison Between Calculation and Experiment
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    Chapter 6 Melting Model for UV Lasers
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    Chapter 7 Applications of Laser Annealing
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    Chapter 8 Optical Regulation Using Crystalline Silicon
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    Chapter 9 Optical and Electrical Properties of Laser Annealed Heavily Doped Silicon
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    Chapter 10 CW-Laser Annealing of CdTe Epitaxial Layers
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    Chapter 11 InSb Optical and Electrical Property Changes Induced by Multi-Pulsed TEA CO 2 -Laser Irradiation
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    Chapter 12 Laser Processing in Silicon on Insulator (SOI) Technologies
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    Chapter 13 Laser Recrystallisation of Silicon-on-Oxide
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    Chapter 14 Fundamentals of Laser Micromachining of Metals
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    Chapter 15 Surface Modelling During Laser Microprocessing
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    Chapter 16 Electronic Structure of Adsorbed Layers
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    Chapter 17 Laser Photochemistry of Molecular Systems Involving Gas-Surface Interactions
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    Chapter 18 Selective Laser-Induced Heterogeneous Chemistry on Surfaces
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    Chapter 19 Spectroscopy of Adsorbates by Transient Laser Calorimetry
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    Chapter 20 Laser Vaporization of Clean and CO-Covered Polycrystalline Copper Surfaces
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    Chapter 21 Laser Investigation of the Dynamics of Molecule-Surface Interactions
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    Chapter 22 Laser-Induced Chemical Vapor Deposition
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    Chapter 23 Structure of Platinum and Tin Films Formed by Laser-Induced Chemical Vapor Deposition
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    Chapter 24 Laser Deposition of Single Crystalline GaAs and Stimulated Sheet Doping
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    Chapter 25 IR Laser Photo-Assisted Deposition of Silicon Films
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    Chapter 26 IR Laser Pyrolysis of Silane
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    Chapter 27 Multiphoton Excitation and Dissociation of SiH 4 Exposed to CO 2 Laser Radiation
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    Chapter 28 Deposition of Silicon Films by Photodissociation of Silane Under IR Laser Irradiation
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    Chapter 29 Characterization of Reactive Intermediates in Silicon Etching and Deposition Using Laser Techniques
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    Chapter 30 The Physics of Ultraviolet Photodeposition
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    Chapter 31 Low Temperature Growth of HgTe by a UV Photosensitisation Method
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    Chapter 32 Applications of Excimer Lasers to Semiconductor Processing
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    Chapter 33 Linear-Focused ArF Excimer Laser Beam for Depositing Hydrogenated Silicon Films
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    Chapter 34 Analysis of UV Laser-Induced Heterogeneous Deposition: Platinum
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    Chapter 35 Laser Photolytic Deposition of Metals on Indium Phosphide
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    Chapter 36 Laser Photochemical Deposition of Metals
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    Chapter 37 Laser Assisted Pyrolytic Growth and Photochemical Deposition of Thin Oxide Films
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    Chapter 38 Laser-Induced Oxidation of Silicon Surfaces
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    Chapter 39 Laser-Assisted Chemical Etching of Inorganic Materials: Mechanistic Studies
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    Chapter 40 Maskless Dry Etching of GaAs by Focused Laser Beam
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    Chapter 41 Laser Induced Reduction and Etching of Oxidic Perovskites
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    Chapter 42 Laser Enhanced Plating and Etching: A Review
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    Chapter 43 Laser Surface Modification Below a Liquid Layer
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    Chapter 44 Selectivity of Etching III–V Compounds by Laser-Induced Electrochemistry
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    Chapter 45 Photochemical Microetching of InP
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    Chapter 46 Ultraviolet Laser Ablation of Organic Polymer Films
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    Chapter 47 Laser-Induced Synthesis of Compound Semiconductors
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    Chapter 48 Laser Synthesis of Thin Film CuInSe 2
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    Chapter 49 Metal/Silicon Reactions Using Pulsed Excimer and Ruby Lasers
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    Chapter 50 Structural Investigation of Laser Processed PZT Ceramics
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    Chapter 51 Light-Induced Sublimation of Cadmium Sulphide
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    Chapter 52 Laser Direct Writing Applications
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    Chapter 53 Laser Fabrication of Integrated Circuits
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    Chapter 54 Thermal and Acoustic Techniques for Monitoring Pulsed Laser Processing
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    Chapter 55 Temperature Diagnostics for Laser Writing
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    Chapter 56 Laser Selective Photoionization Technique: Photoion Beam Epitaxy and Semiconductor Trace Impurity Diagnostics
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    Chapter 57 Optical Microanalysis of Device Materials and Structures
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    Chapter 58 Laser Diagnostics of Submicron VLSI-Structures
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    Chapter 59 Determination of the Mechanical Amplitude Distribution of Quartz Crystal Resonators by Use of a New Noninterferometric Laser Speckle Vibration Measurement System
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    Chapter 60 Characterization of Laser Induced Defects in (Al,Ga)As by Photoetching and TEM Measurements
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    Chapter 61 Optical Characterization of Implantation Damage Recovery and Electrical Activation in GaAs by Raman Scattering
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    Chapter 62 Characterization of Gallium Arsenide Layers on Insulators with Germanium Interface Islands
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    Chapter 63 Surface-Enhanced Raman Scattering as a Diagnostic Method in Preparing Organic Semiconductor Films
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    Chapter 64 Raman-Microsampling Technique Applying Optical Levitation by Radiation Pressure
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    Chapter 65 Photothermal Analysis of Thin Films
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    Chapter 66 Raman Diagnostics of Heterogeneous Chemical Processes
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    Chapter 67 Laser Spectroscopy and Gas-Phase Chemistry in CVD
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    Chapter 68 Laser Diagnostic Studies of Plasma Etching and Deposition
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    Chapter 69 Light Scattering Diagnostics of Gas-Phase Epitaxial Growth (MOCVD-GaAs)
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    Chapter 70 On the Generation of C 2 -Radicals by IR-Multiple-Photon Dissociation
Overall attention for this book and its chapters
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Title
Laser Processing and Diagnostics
Published by
Springer Berlin Heidelberg, November 2013
DOI 10.1007/978-3-642-82381-7
ISBNs
978-3-64-282383-1, 978-3-64-282381-7
Editors

Bäuerle, Dieter

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 10 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 10 100%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 3 30%
Other 2 20%
Lecturer > Senior Lecturer 1 10%
Student > Master 1 10%
Researcher 1 10%
Other 2 20%
Readers by discipline Count As %
Engineering 6 60%
Physics and Astronomy 1 10%
Agricultural and Biological Sciences 1 10%
Materials Science 1 10%
Chemistry 1 10%
Other 0 0%