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Chapter title |
Surface Modification of Semiconductor by Simultaneous Thermal Oxidation Oxidation See Nitridation and Nitridation
|
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Chapter number | 47 |
Book title |
Handbook of Manufacturing Engineering and Technology
|
Published by |
Springer, London, January 2014
|
DOI | 10.1007/978-1-4471-4976-7_47-6 |
Book ISBNs |
978-1-4471-4976-7
|
Authors |
Kuan Yew Cheong, Yew Hoong Wong, Cheong, Kuan Yew, Wong, Yew Hoong |