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Chapter title |
Chemical Vapor Deposition in Manufacturing
|
---|---|
Chapter number | 30 |
Book title |
Handbook of Manufacturing Engineering and Technology
|
Published by |
Springer, London, January 2013
|
DOI | 10.1007/978-1-4471-4976-7_30-5 |
Book ISBNs |
978-1-4471-4976-7
|
Authors |
Leszek Dobrzanski, Daniel Pakula, Marcin Staszuk, Dobrzanski, Leszek, Pakula, Daniel, Staszuk, Marcin |