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Silizium-Planartechnologie

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Attention for Chapter 2: Grundlagen der Halbleiterphysik für Siliziumbauelemente
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Chapter title
Grundlagen der Halbleiterphysik für Siliziumbauelemente
Chapter number 2
Book title
Silizium-Planartechnologie
Published by
Vieweg+Teubner Verlag, January 2003
DOI 10.1007/978-3-322-80070-1_2
Book ISBNs
978-3-51-900467-7, 978-3-32-280070-1
Authors

Hans-Günther Wagemann, Tim Schönauer