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| Chapter title |
Herstellungsprozess von Halbleiterbauelementen
|
|---|---|
| Chapter number | 8 |
| Book title |
Silizium-Planartechnologie
|
| Published by |
Vieweg+Teubner Verlag, January 2003
|
| DOI | 10.1007/978-3-322-80070-1_8 |
| Book ISBNs |
978-3-51-900467-7, 978-3-32-280070-1
|
| Authors |
Hans-Günther Wagemann, Tim Schönauer |