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Chapter title |
Surface Chemical Probes and their Application to the Study of in Situ Semiconductor Processing
|
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Chapter number | 30 |
Book title |
Emerging Technologies for In Situ Processing
|
Published by |
Springer, Dordrecht, January 1988
|
DOI | 10.1007/978-94-009-1409-4_30 |
Book ISBNs |
978-9-40-107130-7, 978-9-40-091409-4
|
Authors |
R. B. Jackman, J. S. Foord |