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Nanopositioning Technologies

Overview of attention for book
Cover of 'Nanopositioning Technologies'

Table of Contents

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    Book Overview
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    Chapter 1 A Review of Stick–Slip Nanopositioning Actuators
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    Chapter 2 Piezoelectric Motor Technology: A Review
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    Chapter 3 Mechanical Design of High-Speed Nanopositioning Systems
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    Chapter 4 Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism
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    Chapter 5 Electro-Magnetic Nano-Positioning
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    Chapter 6 Modeling of Piezoelectric-Actuated Nanopositioning Stages Involving with the Hysteresis
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    Chapter 7 Tracking Control for Nanopositioning Systems
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    Chapter 8 Position Sensors for Nanopositioning
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    Chapter 9 MEMS Nanopositioners
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    Chapter 10 Control Issues of MEMS Nanopositioning Devices
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    Chapter 11 A Review of Nanomanipulation in Scanning Electron Microscopes
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    Chapter 12 Nanopositioning for Lithography and Data Storage
Attention for Chapter 10: Control Issues of MEMS Nanopositioning Devices
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