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| Chapter title |
Control Issues of MEMS Nanopositioning Devices
|
|---|---|
| Chapter number | 10 |
| Book title |
Nanopositioning Technologies
|
| Published by |
Springer, Cham, January 2016
|
| DOI | 10.1007/978-3-319-23853-1_10 |
| Book ISBNs |
978-3-31-923852-4, 978-3-31-923853-1
|
| Authors |
Y. Zhu, S. O. R. Moheimani, M. R. Yuce, A. Bazaei |