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Chapter title |
Microzone Plate Fabrication by 100 keV Electron Beam Lithography
|
---|---|
Chapter number | 15 |
Book title |
X-Ray Microscopy II
|
Published by |
Springer, Berlin, Heidelberg, January 1988
|
DOI | 10.1007/978-3-540-39246-0_15 |
Book ISBNs |
978-3-66-214490-9, 978-3-54-039246-0
|
Authors |
V. Bögli, P. Unger, H. Beneking, B. Greinke, P. Guttmann, B. Niemann, D. Rudolph, G. Schmahl |