You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Timeline
Chapter title |
Examination of Soft X-Ray Contact Images in Photoresist by the Low-Loss Electron Method in the Scanning Electron Microscope
|
---|---|
Chapter number | 56 |
Book title |
X-Ray Microscopy II
|
Published by |
Springer, Berlin, Heidelberg, January 1988
|
DOI | 10.1007/978-3-540-39246-0_56 |
Book ISBNs |
978-3-66-214490-9, 978-3-54-039246-0
|
Authors |
O. C. Wells, Ping-chin Cheng |