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Chapter title |
Modeling of the Oxide Growth in a Chlorine Ambient
|
---|---|
Chapter number | 6 |
Book title |
The Physics and Chemistry of SiO 2 and the Si-SiO 2 Interface
|
Published by |
Springer, Boston, MA, January 1988
|
DOI | 10.1007/978-1-4899-0774-5_6 |
Book ISBNs |
978-1-4899-0776-9, 978-1-4899-0774-5
|
Authors |
Zhi-Min Ling, Luc H. Dupas, Kristin M. De Meyer |