You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
Ion Implantation and Ionizing Radiation Effects in Thermal Oxides
|
---|---|
Chapter number | 57 |
Book title |
The Physics and Chemistry of SiO 2 and the Si-SiO 2 Interface
|
Published by |
Springer, Boston, MA, January 1988
|
DOI | 10.1007/978-1-4899-0774-5_57 |
Book ISBNs |
978-1-4899-0776-9, 978-1-4899-0774-5
|
Authors |
Roderick A. B. Devine |