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Chapter title |
FT-IR Studies Accompanying the Development of a Plasmaless Etching Process on the Basis of the Elemental Halogens Bromine and Fluorine
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Chapter number | 162 |
Book title |
Progress in Fourier Transform Spectroscopy
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Published by |
Springer, Vienna, January 1997
|
DOI | 10.1007/978-3-7091-6840-0_162 |
Book ISBNs |
978-3-21-182931-8, 978-3-70-916840-0
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Authors |
Andreas Erwin Guber, Uwe Köhler, Wilhelm Bier, Guber, Andreas Erwin, Köhler, Uwe, Bier, Wilhelm |