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Chapter title |
Fourier-transform Spectroscopy of Silicon Nitride Layers: Hydrogen Concentration and Thickness Measurements
|
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Chapter number | 180 |
Book title |
Progress in Fourier Transform Spectroscopy
|
Published by |
Springer, Vienna, January 1997
|
DOI | 10.1007/978-3-7091-6840-0_180 |
Book ISBNs |
978-3-21-182931-8, 978-3-70-916840-0
|
Authors |
Ingrid Jonak-Auer, Ronald Meisels, Friedemar Kuchar, Jonak-Auer, Ingrid, Meisels, Ronald, Kuchar, Friedemar |