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Chapter title |
Precision Grinding of Micro-structures of Hard-Brittle Material Surfaces
|
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Chapter number | 15 |
Book title |
Fabrication of Micro/Nano Structures via Precision Machining
|
Published by |
Springer, Singapore, January 2023
|
DOI | 10.1007/978-981-99-1338-1_15 |
Book ISBNs |
978-9-81-991337-4, 978-9-81-991338-1
|
Authors |
Lu, Yanjun, Huang, Yuming, Huang, Haojun, Zhang, Long |