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Fabrication of Micro/Nano Structures via Precision Machining

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Cover of 'Fabrication of Micro/Nano Structures via Precision Machining'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction to Precision Machining Micro/Nano Structures
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    Chapter 2 Tool Offset Flycutting Straight-Groove-Type Microstructures
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    Chapter 3 Tool Offset Flycutting Multi-layer Hierarchical Microstructures
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    Chapter 4 Tool Offset Flycutting Micro-optics Arrays with High-Aspect-Ratio
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    Chapter 5 Diamond Milling System for Fabricating Infrared Micro-optics Arrays
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    Chapter 6 Cutting Force and Energy Modelling in Ultra-Precision Machining of Micro-structures
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    Chapter 7 Introduction to Electrical Discharge Machining Micro/Nano Structures
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    Chapter 8 Fabrication of 3D Micro-electrode and Its Application in Micro-EDM
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    Chapter 9 Fabrication of Micro-structures by Applying Cu-Sn 3D Micro-electrode
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    Chapter 10 Fabrication of Micro-grooves by Applying Laminated Disc Electrodes
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    Chapter 11 Fabrication of Blind Multi-microgrooves by Applying Long-Laminated Electrode
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    Chapter 12 Geometric Evolution of Microstructures in EDM with Composite Laminated Electrode
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    Chapter 13 Introduction to Precision Grinding and Injection Molding Micro/Nano Structures
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    Chapter 14 Precision Dressing and Truing of Diamond Grinding Wheel with V-tip
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    Chapter 15 Precision Grinding of Micro-structures of Hard-Brittle Material Surfaces
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    Chapter 16 Precision Grinding and Polishing of Optical Micro-structured Surface
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    Chapter 17 Fabrication of Micro-structured Polymer Via Precision Grinding and Injection Molding
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    Chapter 18 Fabrication of Micro-structured LED Diffusion Plate Via Precision Grinding and Injection Molding
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Title
Fabrication of Micro/Nano Structures via Precision Machining
Published by
Springer Nature Singapore, June 2023
DOI 10.1007/978-981-99-1338-1
ISBNs
978-9-81-991337-4, 978-9-81-991338-1
Editors

Zhang, Guoqing, Xu, Bin, Lu, Yanjun, To, Suet

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