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Chapter title |
Electron Collisions with Molecules
|
---|---|
Chapter number | 25 |
Book title |
Lecture Notes on Principles of Plasma Processing
|
Published by |
Springer, Boston, MA, January 2003
|
DOI | 10.1007/978-1-4615-0181-7_25 |
Book ISBNs |
978-0-306-47497-2, 978-1-4615-0181-7
|
Authors |
Francis F. Chen, Jane P. Chang |