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Lecture Notes on Principles of Plasma Processing

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Cover of 'Lecture Notes on Principles of Plasma Processing'

Table of Contents

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    Book Overview
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    Chapter 1 What is a Plasma?
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    Chapter 2 Plasma Fundamentals
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    Chapter 3 Gas Discharge Fundamentals
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    Chapter 4 Introduction to Plasma Sources
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    Chapter 5 Rie Discharges
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    Chapter 6 ECR Sources
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    Chapter 7 Inductively Coupled Plasmas (ICPs)
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    Chapter 8 Helicon Wave Sources and HDPs
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    Chapter 9 Discharge Equilibrium
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    Chapter 10 Introduction
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    Chapter 11 Remote Diagnostics
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    Chapter 12 Langmuir Probes
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    Chapter 13 Other Local Diagnostics
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    Chapter 14 Plasma Processing
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    Chapter 15 Applications in Microelectronics
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    Chapter 16 Kinetic Theory
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    Chapter 17 Practical Gas Kinetic Models and Macroscopic Properties
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    Chapter 18 Collision Dynamics
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    Chapter 19 Atomic Energy Levels
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    Chapter 20 Atomic Collisions
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    Chapter 21 Elastic Collisions
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    Chapter 22 Inelastic Collisions
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    Chapter 23 Molecular Energy Levels
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    Chapter 24 Selection Rule for Optical Emission of Molecules
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    Chapter 25 Electron Collisions with Molecules
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    Chapter 26 Heavy Particle Collisions
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    Chapter 27 Gas Phase Kinetics
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    Chapter 28 Optical Emission Spectroscopy
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    Chapter 29 Laser Induced Fluorescence
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    Chapter 30 Laser Interferometry
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    Chapter 31 Full-Wafer Interferometry
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    Chapter 32 Mass Spectrometry
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    Chapter 33 Plasma Chemistry
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    Chapter 34 Surface Reactions
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    Chapter 35 Loading
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    Chapter 36 Selectivity
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    Chapter 37 Detailed Reaction Modeling
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    Chapter 38 Fundamentals of Feature Evolution in Plasma Etching
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    Chapter 39 Predictive Modeling
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    Chapter 40 Mechanisms of Profile Evolution
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    Chapter 41 Profile Simulation
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    Chapter 42 Plasma Damage
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Citations

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143 Dimensions

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134 Mendeley
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Title
Lecture Notes on Principles of Plasma Processing
Published by
Springer US, December 2012
DOI 10.1007/978-1-4615-0181-7
ISBNs
978-1-4615-0181-7, 978-0-306-47497-2
Authors

Chen, Francis F., Chang, Jane P.

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 134 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
China 1 <1%
Germany 1 <1%
Unknown 132 99%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 25 19%
Student > Master 16 12%
Researcher 14 10%
Student > Doctoral Student 12 9%
Student > Bachelor 12 9%
Other 13 10%
Unknown 42 31%
Readers by discipline Count As %
Physics and Astronomy 39 29%
Engineering 17 13%
Materials Science 11 8%
Energy 4 3%
Chemistry 4 3%
Other 12 9%
Unknown 47 35%