You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Mendeley readers
| Chapter title |
Ion implantation in CMOS Technology: Machine Challenges
|
|---|---|
| Chapter number | 15 |
| Book title |
Ion Implantation and Synthesis of Materials
|
| Published by |
Springer, Berlin, Heidelberg, January 2006
|
| DOI | 10.1007/978-3-540-45298-0_15 |
| Book ISBNs |
978-3-54-023674-0, 978-3-54-045298-0
|
Mendeley readers
The data shown below were compiled from readership statistics for 4 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 4 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 3 | 75% |
| Professor > Associate Professor | 1 | 25% |
| Readers by discipline | Count | As % |
|---|---|---|
| Physics and Astronomy | 2 | 50% |
| Materials Science | 1 | 25% |
| Unknown | 1 | 25% |