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| Chapter title |
Photo-Microlithography Fabrication of the Parts of a Micro-Mechanical Calculator
|
|---|---|
| Chapter number | 3 |
| Book title |
Building and Probing Small for Mechanics
|
| Published by |
Springer, Cham, September 2020
|
| DOI | 10.1007/978-3-030-56777-4_3 |
| Book ISBNs |
978-3-03-056776-7, 978-3-03-056777-4
|
| Authors |
Christian Bourgerette, Laure Noé, Sebastien Pinaud, Christian Joachim, Bourgerette, Christian, Noé, Laure, Pinaud, Sebastien, Joachim, Christian |