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| Chapter title |
The Incredible Shrinking IC: Part 4 BEOL Low-K Intermetal Dielectrics and Multilevel Copper Metallization
|
|---|---|
| Chapter number | 12 |
| Book title |
How Transistor Area Shrank by 1 Million Fold
|
| Published by |
Springer, Cham, January 2020
|
| DOI | 10.1007/978-3-030-40021-7_12 |
| Book ISBNs |
978-3-03-040020-0, 978-3-03-040021-7
|
| Authors |
Howard Tigelaar, Tigelaar, Howard |