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Chapter title |
One-Dimensional Numerical Simulation of a Capacitively Coupled Oxygen Plasma Driven by a Dual Frequency Generator at Low Temperature
|
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Chapter number | 56 |
Book title |
ICREEC 2019
|
Published by |
Springer, Singapore, January 2020
|
DOI | 10.1007/978-981-15-5444-5_56 |
Book ISBNs |
978-9-81-155443-8, 978-9-81-155444-5
|
Authors |
Z. Kechidi, A. Tahraoui, A. H. Belbachir, W. Adress, N. Ouldcherchali |