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| Chapter title |
Tribo-mechanical Aspects in Micro-electro Mechanical Systems (MEMS)
|
|---|---|
| Chapter number | 13 |
| Book title |
Tribology in Materials and Applications
|
| Published by |
Springer, Cham, January 2020
|
| DOI | 10.1007/978-3-030-47451-5_13 |
| Book ISBNs |
978-3-03-047450-8, 978-3-03-047451-5
|
| Authors |
Anand Singh Rathaur, Jitendra Kumar Katiyar, Vinay Kumar Patel, Rathaur, Anand Singh, Katiyar, Jitendra Kumar, Patel, Vinay Kumar |