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Chapter title |
Enhancing Prediction Quality of Fab Simulation by Advanced Cycle Time Modelling
|
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Chapter number | 4 |
Book title |
Digital Transformation in Semiconductor Manufacturing
|
Published by |
Springer, Cham, November 2018
|
DOI | 10.1007/978-3-030-48602-0_4 |
Book ISBNs |
978-3-03-048601-3, 978-3-03-048602-0
|
Authors |
Maximilian Dilefeld, Sebastian Rank, Thorsten Schmidt, Dilefeld, Maximilian, Rank, Sebastian, Schmidt, Thorsten |