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Plasma-deposited fluoropolymer film mask for local porous silicon formation

Overview of attention for article published in Discover Nano, June 2012
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28 Mendeley
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Title
Plasma-deposited fluoropolymer film mask for local porous silicon formation
Published in
Discover Nano, June 2012
DOI 10.1186/1556-276x-7-344
Pubmed ID
Authors

Thomas Defforge, Marie Capelle, François Tran-Van, Gaël Gautier

Abstract

The study of an innovative fluoropolymer masking layer for silicon anodization is proposed. Due to its high chemical resistance to hydrofluoric acid even under anodic bias, this thin film deposited by plasma has allowed the formation of deep porous silicon regions patterned on the silicon wafer. Unlike most of other masks, fluoropolymer removal after electrochemical etching is rapid and does not alter the porous layer. Local porous regions were thus fabricated both in p+-type and low-doped n-type silicon substrates.

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 28 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
France 3 11%
Greece 1 4%
United States 1 4%
Unknown 23 82%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 7 25%
Student > Doctoral Student 4 14%
Researcher 4 14%
Student > Master 3 11%
Professor 3 11%
Other 3 11%
Unknown 4 14%
Readers by discipline Count As %
Engineering 17 61%
Chemistry 2 7%
Physics and Astronomy 1 4%
Materials Science 1 4%
Unknown 7 25%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 1. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 26 June 2012.
All research outputs
#22,756,649
of 25,371,288 outputs
Outputs from Discover Nano
#798
of 1,146 outputs
Outputs of similar age
#160,567
of 177,443 outputs
Outputs of similar age from Discover Nano
#21
of 41 outputs
Altmetric has tracked 25,371,288 research outputs across all sources so far. This one is in the 1st percentile – i.e., 1% of other outputs scored the same or lower than it.
So far Altmetric has tracked 1,146 research outputs from this source. They receive a mean Attention Score of 3.5. This one is in the 1st percentile – i.e., 1% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 177,443 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 41 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.